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Titan:- True Growth Rate Closed Loop Control.
Titan's Pedigree
Personnel from the research and development team at EMF personnel played a key role in the development of the world’s first commercial MOCVD system in the early 1980’s and they were responsible for the incorporation of vent/run switching manifolds and gas manifold pressure balancing. These advances lead to a viable production tool for the manufacture of QW laser structures.
EMF has supplied systems for both production and research world-wide. Applications include GaN, SiC, CMT, AlGaAs, and InGaAs. The company has the flexibility to supply standard system configurations and custom solutions to meet individual customer requirements.
Titan: The future of MOCVD
The increasing complexity and ever tighter demands on growth conditions of current and predicted low dimensional structures, including challenging materials such as GaInN, has rendered most MOCVD systems designs inadequate. To achieve the level of reproducibility now demanded, requires a totally new approach. Titan has been designed to resolve the limitations of current tool designs.
EMF’s research and development team have designed a closed loop control MOCVD system incorporating the latest in-situ monitoring technology. A dynamic laser interferometer is combined with and integrated into the advanced MOCVD process system to provide realtime growth rate control in the latest EMF tool.
EMF
LIMITED
Unit 5 Chesterton Mills, French's Road
Cambridge CB4 3NP, England.
Telephone: +44 (0)1223 - 352 244
Facsimile: + 44 (0)1223 - 352 444
Email:
information@emf.co.uk
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