EMF's research and development team have designed a closed loop control MOCVD system incorporating the latest in-situ monitoring technology. A laser interferometer combined, with the OptoMet software is integrated into the advanced MOCVD process program which provides dynamic growth rate control for Saturn.

Closed Loop Control of:

• Layer Thickness
• Growth Rate
• Alloy Composition
• Pressure
• Cell Temperature
• Metalorganic flow rate

Read More about Saturn's features:

• Saturn's Cell
• Saturn's Console
• Saturn's Closed Loop Control
• Saturn's Accessories
• Saturn's Support
• Equipment Homepage