MOCVD Equipment and Technology

Saturn:- True Growth Rate Closed Loop Control for Production.

Saturn: Production.

2 to 4 inch wafers

VFE Technology

Closed Loop Control and in-situ monitoring

Atmospheric pressure operation

Saturn: The future of MOCVD Production
With the advanced VFE and atmospherics pressure operation the Saturn production system offers unrivaled MO efficiency. The Closed loop control delivers improved repeatability and reproducibility, while the Reactor Control Center RC2 makes Saturn easy to use.

EMF LIMITED
Unit 5 Chesterton Mills, French's Road
Cambridge CB4 3NP, England.
Telephone: +44 (0)1223 - 352 244
Facsimile: + 44 (0)1223 - 352 444
Email: information@emf.co.uk