Mercury: Research.
The Mercury MOCVD tool is a versatile R&D system. The cell area is of a quartz construction and can accomodate wafers of various sizes from 1 x 2 inch to 2 x 3 inch.
For cell heating selct from IR or RF.
The system can be configured with the following standard optional features:

• Load Lock, with automatic wafer transfer and pre-evacuate and bake facility.
• Direct drive wafer rotation for applications requiring high uniformity.
• In-situ monitoring for closed loop control.

Read More about Mercury's features:

• Mercury's Cell
• Mercury's Console
• Mercury's Closed Loop Control
• Mercury's Accessories
• Mercury's Support
• Equipment Homepage